| 发明名称 |
ELECTRO-MECHANICAL DESIGNS FOR MEMS SCANNING MIRRORS |
| 摘要 |
Electro-mechanical designs for MEMS scanning mirrors are described. In various embodiments, a driving coil may be situated on a reflective portion of a MEMS mirror. In some embodiments, a sensing coil may be situated partially or entirely on an outer frame portion of the MEMS mirror. Other embodiments are described and claimed. |
| 申请公布号 |
US2017102538(A1) |
申请公布日期 |
2017.04.13 |
| 申请号 |
US201514977457 |
申请日期 |
2015.12.21 |
| 申请人 |
GAMET JULIEN;FOTINOS ALEXANDRE;ABELE NICHOLAS |
发明人 |
GAMET JULIEN;FOTINOS ALEXANDRE;ABELE NICHOLAS |
| 分类号 |
G02B26/10;G02B26/08 |
主分类号 |
G02B26/10 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An apparatus, comprising:
a reflective portion; a frame disposed at least partially around the reflective portion; a driving coil to receive a first electric current to induce movement of the reflective portion about a first axis in response to the received electric current; and a sensing coil disposed at least partially around the driving coil, the induced movement to induce a second electric current in the sensing coil, the second electric current to indicate a position of the reflective portion about the first axis. |
| 地址 |
SAINT PIERRE D'ALLEVARD FR |
