| 发明名称 |
System and Method for a Multi-Electrode MEMS Device |
| 摘要 |
According to an embodiment, a MEMS transducer includes a stator, a rotor spaced apart from the stator, and a multi-electrode structure including electrodes with different polarities. The multi-electrode structure is formed on one of the rotor and the stator and is configured to generate a repulsive electrostatic force between the stator and the rotor. Other embodiments include corresponding systems and apparatus, each configured to perform corresponding embodiment methods. |
| 申请公布号 |
US2017041716(A1) |
申请公布日期 |
2017.02.09 |
| 申请号 |
US201514818007 |
申请日期 |
2015.08.04 |
| 申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
Barzen Stefan |
| 分类号 |
H04R19/00;H04R19/02;H04R31/00;H04R19/04 |
主分类号 |
H04R19/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A microelectromechanical systems (MEMS) transducer comprising:
a stator; a rotor spaced apart from the stator; and a multi-electrode structure including electrodes with different polarities, wherein the multi-electrode structure is
formed on one of the rotor and the stator, andconfigured to generate a repulsive electrostatic force between the stator and the rotor. |
| 地址 |
Neubiberg DE |
