| 摘要 |
An embodiment provides an optical image measuring apparatus capable of acquiring images with high lateral resolution and global sharpness. An optical image measuring apparatus of an embodiment includes an optical system, image forming part, controller and composite-cross-sectional-image forming part. The optical system includes a scanner that changes an irradiation position of signal light on an object and a focus position changing part that changes a focus position of the signal light. The optical system detects interference light of returned light of the respective signal light from the object and reference light. The image forming part forms a cross-sectional image based on detection results of a plurality of interference light corresponding to a plurality of irradiation positions of the signal light. The controller controls the optical system to irradiate the signal light onto the plurality of irradiation positions repeatedly while changing the focus position. The composite-cross-sectional-image forming part forms one composite cross-sectional image based on two or more cross-sectional images formed by the image forming part on the basis of results of repetitive irradiation of the signal light. |
