发明名称 パルスレーザ装置、露光装置および検査装置
摘要 PROBLEM TO BE SOLVED: To provide a pulse laser device capable of outputting pulse light of a narrow band, even if SPM generated in an optical fiber is relatively large.SOLUTION: A pulse laser device 1 includes: first and second laser sources 11 and 12 for outputting first and second pulse light; first and second fiber amplifiers 21 and 22 for amplifying the first and second pulse light; and a wavelength conversion optical system 30 composed of first-third series. The first and second laser sources 11 and 12 have first and second intensity modulators for cutting out the pulse light outputted to the first and second fiber amplifiers 21 and 22. The wavelength converting portion 30 has a wavelength conversion optical element 36 for generating conversion pulse light by sum frequency generation. The first and second intensity modulators cut out and output the first pulse light and the second pulse light so as to fix a phase of pulse light Lgenerated by the wavelength conversion optical element 36.
申请公布号 JP6016124(B2) 申请公布日期 2016.10.26
申请号 JP20130104239 申请日期 2013.05.16
申请人 株式会社ニコン 发明人 徳久 章
分类号 G02F1/37;H01S3/00;H01S3/067;H01S3/10 主分类号 G02F1/37
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