VIBRATOR ELEMENT, VIBRATOR, GYRO SENSOR, ELECTRONIC APPARATUS, AND MOVING OBJECT

摘要

A vibrator element includes a drive arm. The drive arm includes an upper surface, a lower surface, a groove opened to the upper surface, and a groove opened to the lower surface. The upper surface is disposed to be deviated by L1 on a +X axis side from the lower surface. The groove is disposed to be deviated by L2 on the +X axis side from the groove. L1 and L2 satisfy a relation of L2/L1>0.

主权项

1. A vibrator element comprising:
a base portion; and a vibration arm that is connected to the base portion and performs flexural vibration in a first direction included in an in-plane direction of the base portion, wherein the vibration arm includes a first main surface, a second main surface having a front and rear relation with the first main surface, a first groove opened to the first main surface, and a second groove opened to the second main surface, wherein the first main surface is disposed to be deviated on one side of the first direction from the second main surface, wherein the first groove is disposed to be deviated on the one side of the first direction from the second groove, and wherein when L1 is a deviation quantity in the first direction at a center of the first main surface in the first direction from a center of the second main surface in the first direction and when L2 is a deviation quantity in the first direction at a center of an opening of the first groove in the first direction from a center of an opening of the second groove in the first direction, a relation of L2/L1>0 is satisfied.