发明名称 |
LASER-OSCILLATION COOLING DEVICE |
摘要 |
Provided is a laser-oscillation cooling device comprising: a storage tank that is capable of storing, at atmospheric pressure, a cryogenic liquid and a laser excitation unit which generates heat locally while exciting a laser beam, and that is capable of dis - charging evaporated cryogenic liquid; a pressurization/supply unit for pressurizing the cryogenic liquid stored in the storage tank and supplying the cryogenic liquid to the laser excitation unit; and a de-compression/return unit for returning the cryogenic liquid, that was supplied to the laser excitation unit and used for cooling the laser excitation unit, to the storage tank while decompressing the cryogenic liquid. |
申请公布号 |
EP3067999(A1) |
申请公布日期 |
2016.09.14 |
申请号 |
EP20150765048 |
申请日期 |
2015.02.26 |
申请人 |
MITSUBISHI HEAVY INDUSTRIES, LTD. |
发明人 |
KASAHARA JIRO;KONDO YOSHIYUKI;ISHII SHINYA;HAMAMOTO KOICHI |
分类号 |
H01S3/042;H01L23/473;H05K7/20 |
主分类号 |
H01S3/042 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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