| 发明名称 |
Wafer Holder |
| 摘要 |
A wafer holder includes a holder main body, a supporting member, and a limiting member. The holder main body has a through hole region. The supporting member has a supporting main body and supporting legs. The supporting main body is disposed on an inner surface of the through hole region, and the supporting legs are attached to an inner surface of the supporting main body and configured to support a wafer. The limiting member is attached to the supporting main body and disposed between two adjacent supporting legs and opposite to a flat side of the wafer. |
| 申请公布号 |
US2016240398(A1) |
申请公布日期 |
2016.08.18 |
| 申请号 |
US201514703113 |
申请日期 |
2015.05.04 |
| 申请人 |
HERMES-EPITEK CORPORATION |
发明人 |
Oishi Takahiro;Wong Kian-Poh;Huang Tsan-Hua;Shieh Shih-Yung |
| 分类号 |
H01L21/673 |
主分类号 |
H01L21/673 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A wafer holder, comprising:
a holder main body having a through hole region; a supporting member wherein the supporting member comprises:
a supporting main body disposed on the through hole region; and a plurality of supporting legs attached to an inner surface of the supporting main body and configured to support a wafer; and
a limiting member attached to the supporting main body and disposed between two adjacent supporting legs, wherein the limiting member is opposite to a flat side of the wafer. |
| 地址 |
Taipei TW |
