| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma generator which inhibits the deterioration of an electrode and the contamination on a surface of a processed object.SOLUTION: A plasma generator 100 includes: a first electrode part E10; a second electrode part E20; a first electrode part gas supply part 110; a second electrode part gas supply part 120; a first electrode part gas exhaust part 130; a second electrode part gas exhaust part 140; and main gas supply parts 150, 160. The first electrode part E10 includes: a first electrode E11; a spare room P11; a gas supply path 60; a gas exhaust passage 70; and a through hole 31. The spare room P1 communicates with the gas exhaust passage 70. Further, the spare room P11 communicates with the gas supply path 60 through the through hole 31. |
