发明名称 |
RESIN DISPENSER FOR NANO-IMPRINT |
摘要 |
A resin dispenser for nano-imprinting includes a housing including a lower chamber in which a resin is filled, a slit defined in a lower part of the lower chamber and through which the resin is discharged, and an upper chamber in which a pressure-applying fluid is filled, and a membrane separating the lower and upper chambers from each other, and of which an edge is fixed on a middle part of the housing, where the fluid is configured to apply the pressure to the membrane and protrude the membrane toward the slit of the lower chamber. |
申请公布号 |
US2016152022(A1) |
申请公布日期 |
2016.06.02 |
申请号 |
US201615010474 |
申请日期 |
2016.01.29 |
申请人 |
Samsung Electronics Co., Ltd. ;Samsung Display Co., LTD. |
发明人 |
SHIN Bong-su;KIM Dong-ouk;PARK Joon-young;LEE Sung-hoon;CHUNG Jae-seung;HAHM Suk-gyu;LEE Dae-young;JO Gug-rae |
分类号 |
B41F31/02 |
主分类号 |
B41F31/02 |
代理机构 |
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代理人 |
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主权项 |
1. A resin dispenser for nano-imprinting, comprising:
a housing in which a slit is defined in a lower part of the housing; a shape-memory alloy film which is fixed on an upper surface of the housing; and a power source which supplies power to the shape-memory alloy film. |
地址 |
Suwon-si KR |