| 摘要 |
The present invention relates to a manufacturing process monitoring system in a semiconductor manufacturing process. The process monitoring system comprises: a semiconductor process apparatus; an image acquisition apparatus installed in the semiconductor process apparatus so as to acquire first and second image data, which are low resolution and high resolution respectively; and a managing server including a memory storing standard image data, and generating error information by comparing the second image data to the standard image data. According to the present invention, if an error occurs, a user is able to conveniently check a situation when the error occurs through a video, thereby helping the user to take an appropriate measure. |
