| 摘要 |
PROBLEM TO BE SOLVED: To provide an imprint device where a foreign material never adheres to a mold after transfer, and to provide a control method thereof.SOLUTION: A control method of imprint device includes a step for performing dummy discharge of resin from an ink jet head 7 to a dummy discharge receiving section 8, before carrying a substrate 111 into a chamber 1A, and a step for not performing dummy discharge at least after transferring a pattern to the resin until the substrate 111 is carried out from the chamber 1A.SELECTED DRAWING: Figure 2 |
