| 摘要 |
PROBLEM TO BE SOLVED: To provide a resist material that can be easily patterned and gives a film excellent in various film characteristics, particularly in adhesiveness to a substrate used for a circuit board, and excellent in reliability as an electric/electronic component, particularly in alkali resistance, and a protective film for an electric/electronic component having high reliability.SOLUTION: A chemically amplified negative resist material is provided, which comprises (A) a silicone skeleton-containing polymeric compound having a repeating unit of formula (1) and a weight average molecular weight of 3,000 to 500,000, (B) a polyhydric phenolic compound, (C) a photoacid generator, and (D) a solvent.SELECTED DRAWING: None |
