发明名称 SUBSTRATE STORING CONTAINER
摘要 The bottom plate has a plate-like shape, is arranged to face an outer face of a lower wall, and has a locking portion. The groove member has: a groove-forming portion having a groove opening downward formed therein, a surrounding wall portion, which is connected to the groove-forming portion, and is arranged around the groove-forming portion; and a locked portion, which is connected to the surrounding wall portion, is elastically deformable, and is locked by way of the locking portion of the bottom plate by being elastically deformed. The groove member is supported and fixed by way of the lower wall and the bottom plate.
申请公布号 US2016126122(A1) 申请公布日期 2016.05.05
申请号 US201314895890 申请日期 2013.06.03
申请人 SHIN-ETSU POLYMER CO., LTD. ;MIRAIAL CO., LTD. 发明人 KANAMORI Yuta
分类号 H01L21/673 主分类号 H01L21/673
代理机构 代理人
主权项 1. A substrate storing container comprising: a container main body including a tubular wall portion with a container main body opening portion formed at one end portion and the other end portion closed, the wall portion having a back wall, an upper wall, a lower wall, and a pair of side walls, the container main body opening portion being formed by one end portion of the upper wall, one end portion of the lower wall, and one end portions of the side walls, wherein a substrate storing space that can store a plurality of substrates and is in communication with the container main body opening portion is formed by an inner face of the upper wall, an inner face of the lower wall, inner faces of the side walls, and an inner face of the back wall; a lid body that is removably attached to the container main body opening portion and can close the container main body opening portion; a bottom plate having a plate-like shape, arranged to face an outer face of the lower wall, and including a locking portion; and a groove member including a groove-forming portion having a groove opening downward formed therein, a surrounding wall portion, which is connected to the groove-forming portion, and is arranged around the groove-forming portion, and a locked portion, which is connected to the surrounding wall portion, is elastically deformable, and is locked by means of the locking portion of the bottom plate by being elastically deformed, the groove member being supported and fixed by means of the lower wall and the bottom plate.
地址 Chiyoda-ku, Tokyo JP