发明名称 平板ガラスの異物検査装置及び検査方法
摘要 The present invention relates to an apparatus for detecting particles in flat glass and a detecting method using the same. The present invention provides an apparatus for detecting particles in flat glass, comprising: an illumination unit which is installed in one region selected from upper and lower regions on the basis of flat glass; a first polarizer which is installed between the illumination unit and the flat glass, and has a first polarization direction; a first camera and a second camera which are installed in the opposite direction where the illumination unit is installed on the basis of the flat glass; a second polarizer which is equipped in a space between the first camera and the flat glass, and has a polarization direction in the range of 0° to 20° that is different from the polarization direction of the first polarizer; a fourth polarizer which is equipped in a space between the second camera and the flat glass, and has a polarization direction in the range of 70° to 90° that is different from the polarization direction of the first polarizer; and a processor which receives images obtained from the first camera and the second camera, and decides whether defects are benign particles or malignant particles.
申请公布号 JP5909751(B2) 申请公布日期 2016.04.27
申请号 JP20110082752 申请日期 2011.04.04
申请人 コーニング精密素材株式会社Corning Precision Materials Co., Ltd. 发明人 キム,ヒョンウ;キム,ミスン;ユ,ソラ;キム,ガヒョン;キム,テホ;リ,チャンハ
分类号 G01N21/88;G01N21/958 主分类号 G01N21/88
代理机构 代理人
主权项
地址