Abrasive articles, method for their preparation and method of their use

摘要

Abrasive articles containing solid abrasive particles (A) selected from the group consisting of inorganic particles, organic particles and inorganic-organic hybrid particles (a1) having an average primary particle size of from 1 to 500 nm as determined by laser light diffraction and having electron donor groups (a2) chemically bonded to their surface are provided. The said solid abrasive particles (A) are distributed throughout or on top of or throughout and on top of a solid matrix (B). A method for manufacturing abrasive articles and a method for processing substrates useful for fabricating electrical and optical devices are provided. The said methods make use of the said abrasive articles.

主权项

1. An abrasive article, comprising:
solid abrasive particles throughout, on top of, or throughout and on top of a solid matrix, wherein the solid abrasive particles are at least one type of particles selected from the group consisting of an inorganic particle, an organic particle, and an inorganic-organic hybrid particle, an average primary particle size of the solid abrasive particles is from 1 to 500 nm as determined by laser light diffraction, and the solid abrasive particles comprise an electron donor group chemically bonded to a surface of the particles, wherein the electron donor group is covalently bonded to the particles via a multivalent linking group selected from the group consisting of —(—O—)4Si, —(—O—)3Si—, —(—O—)2Si<, —O—SiΞ, —(—O—)2Si(—R)—, and —O—Si(—R)2—, wherein R is a hydrogen atom or a non-reactive, monovalent, substituted or unsubstituted moiety having from 1 to 20 carbon atoms, with the proviso that R bonded to silicium is not a hydrogen atom.