发明名称 |
SEMICONDUCTOR DIE |
摘要 |
A semiconductor die includes a substrate and an insulation layer over the substrate. The semiconductor die also includes a plurality of P-metal gate areas within the insulation layer and over a first device region. The semiconductor device further includes a plurality of N-metal gate areas within the insulation layer and over the first device region. The semiconductor device additionally includes a plurality of dummy P-metal gate areas within the insulation layer and over a second device region. The semiconductor device also includes a plurality of dummy N-metal gate areas within the insulation layer and over the second device region. At least one N-metal gate area individually differs in size compared to at least one P-metal gate area. At least one dummy P-metal gate area individually differs in size compared to at least one dummy N-metal gate area. |
申请公布号 |
US2016093610(A1) |
申请公布日期 |
2016.03.31 |
申请号 |
US201514955690 |
申请日期 |
2015.12.01 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
CHUANG Harry-Hak-Lay;ZHU Ming |
分类号 |
H01L27/07;H01L29/49;H01L29/423;H01L27/092;H01L49/02 |
主分类号 |
H01L27/07 |
代理机构 |
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代理人 |
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主权项 |
1. A semiconductor die comprising:
a substrate; an insulation layer over the substrate; a plurality of P-metal gate areas within the insulation layer and over a first device region of the substrate; a plurality of N-metal gate areas within the insulation layer and over the first device region; a plurality of dummy P-metal gate areas within the insulation layer and over a second device region of the substrate different from the first device region; and a plurality of dummy N-metal gate areas within the insulation layer and over the second device region, wherein
at least one N-metal gate area of the plurality of N-metal gate areas over the first device region individually differs in size compared to at least one P-metal gate area of the plurality of P-metal gate areas over the first device region, andat least one dummy P-metal gate area of the plurality of dummy P-metal gate areas over the second device region individually differs in size compared to at least one dummy N-metal gate area of the plurality of dummy N-metal gate areas over the second device region. |
地址 |
Hsinchu TW |