Vacuum ion pump

摘要

The present invention refers to a vacuum ion pump, used for achieving high vacuum conditions, particularly suitable for applications to an environment (for instance a pipe) wherein a beam of charged particles travels. According to the invention, the ion pump (1) comprises a plurality of pumping sets (A,B,C), spaced from one another and arranged around the channel (4) of the pump (1) through which the beam of charged particles passes. Each pumping set (A,B,C) is provided with its own shield (19A,19B,19C) made of ferromagnetic material and interposed between the magnets (17B,17C) of the pumping set and the channel (4), whereby passages (23) are defined from the channel (4) to the pumping sets (A,B,C). Thanks to the structure of the ion pump according to the invention, the beam of charged particles is effectively shielded from the magnetic field of the pumping sets, without causing any relevant deterioration to the conductance and to the pumping efficiency of the ion pump (1).