发明名称 HEATING JACKET WITH BUTTON OR BAND
摘要 The present invention relates to a heating jacket which is designed to cover an exterior of a gas pipe line. More specifically, the present invention relates to a heating jacket for a pipe line, which is installed on an outer surface of the gas pipe line transporting reaction gas used in a chemical process in an apparatus for producing semiconductors or a liquid crystal display (LCD), so as to heat the exterior of the gas pipe line for allowing the reaction gas to smoothly flow through. In addition, the heating jacket is standardized in the fixed length and shape so that the jacket can be selectively installed depending on the diameter and the length of the pipe line.
申请公布号 KR101603950(B1) 申请公布日期 2016.03.16
申请号 KR20140167610 申请日期 2014.11.27
申请人 HANYANGTMS CO., LTD. 发明人 PARK, EUN KUK
分类号 H01L21/324;H01L21/02 主分类号 H01L21/324
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