| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a microlens array laminating device which is capable of manufacturing a microlens array superior in lens performance by accurately adjusting gaps between unit microlens arrays to allow magnification and focus adjustment during manufacturing of the microlens array. <P>SOLUTION: Upper surfaces of unit microlens arrays 1, 2, and 3 are detected by contact type displacement gauges 33 and 34 to adjust gaps between the unit microlens arrays 1, 2, and 3 to a prescribed value. Planar alignment among the unit microlens arrays 1, 2, and 3 is achieved by alignment marks P3 and P4. A distance between an upper surface of a reference mask 4 and a lower surface of a reticle 5 is measured by laser displacement gauges 31 and 32. An image of a reference mask pattern P1 on the upper surface of the reference mask 4 and an image of a reticle pattern P2 on the lower surface of the reticle 5 are detected by a camera 21, and the gaps between the unit microlens arrays 1, 2, and 3 are adjusted so that these image are in-focus. <P>COPYRIGHT: (C)2013,JPO&INPIT |
