Apparatus for coating internal cavities of small cross section and large longitudinal dimensions using magnetron-sputtering method

摘要

In the present invention, there is disclosed an apparatus for coating internal cavities of small cross section and large longitudinal dimensions using magnetron-sputtering method comprising a vacuum chamber (1) of elongate form secured in a stand (15) with a connection to a vacuum pumping system (2). The vacuum chamber (1) is provided at its one end with a flange (4) with electrical vacuum bushing insulator (6). In the flange (4), there is secured a fixture (10) for a component (9) to be coated. A sputtered cathode (8), having the form of a rod and co-axially arranged within the cavity of the coated component (9), is connected with the conductor (7) of the electrical vacuum bushing insulator (9). At the other closed end (17), the vacuum chamber has a working gas inlet (2) opening. The stand (15) is coupled with a travel path with a holder (16) of a ring magnet mounted slidable thereon, wherein said ring magnet (13) is arranged around the vacuum chamber (1).