SUBSTRATE TRANSFER ROBOT END EFFECTOR

摘要

Embodiments of apparatus for supporting a substrate are disclosed herein. In some embodiments, an apparatus for supporting a substrate includes a support member; and a plurality of substrate contact elements protruding from the support member, wherein each of the plurality of substrate contact elements includes: a first contact surface to support a substrate when placed thereon; and a second contact surface extending from the first contact surface, wherein the second contact surface is adjacent a periphery of the substrate to prevent radial movement of the substrate, wherein the first contact surface is at a first angle with respect to the support member and the second contact surface is at a second angle with respect to the support member, and wherein the first angle is between about 3 degrees and 5 degrees.

主权项

1. An apparatus for supporting a substrate, comprising:
a support member; and a plurality of substrate contact elements protruding from the support member, wherein each of the plurality of substrate contact elements comprises:
a first contact surface to support a substrate when placed thereon; anda second contact surface extending from the first contact surface,wherein the second contact surface is adjacent a periphery of the substrate to prevent radial movement of the substrate,wherein the first contact surface is at a first angle with respect to the support member and the second contact surface is at a second angle with respect to the support member, andwherein the first angle is between about 3 degrees and 5 degrees.