发明名称 |
Microfluidic surface processing systems with self-regulated distance-to surface control |
摘要 |
A microfluidic surface processing system includes a microfluidic probe head having a processing fluid circuit configured to dispense a surface processing fluid from a processing fluid aperture thereof; a linkage mechanism, configured to apply a force to or modulate a force applied to the microfluidic probe head towards a surface to be processed; and a lifting fluid circuit integral with the microfluidic probe head and distinct from the processing fluid circuit, the lifting fluid circuit designed for dispensing a lifting fluid from a lifting fluid aperture thereof, with pressure such as to counter the force applied or modulated by the linkage mechanism, at the level of the surface. |
申请公布号 |
US9229455(B2) |
申请公布日期 |
2016.01.05 |
申请号 |
US201414156915 |
申请日期 |
2014.01.16 |
申请人 |
International Business Machines Corporation |
发明人 |
Delamarche Emmanuel;Hitzbleck Martina;Kaigala Govind;Lovchik Robert |
分类号 |
G05D7/06;B81C99/00;B01L3/02;G01N1/31;G01N1/32;G01N35/10 |
主分类号 |
G05D7/06 |
代理机构 |
Cantor Colburn LLP |
代理人 |
Cantor Colburn LLP ;Zarick Gail |
主权项 |
1. A microfluidic surface processing system, comprising:
a microfluidic probe head having a processing fluid circuit configured to dispense a surface processing fluid from a processing fluid aperture thereof; a linkage mechanism, configured to apply a force to or modulate a force applied to the microfluidic probe head towards a surface to be processed; and a lifting fluid circuit integral with the microfluidic probe head and distinct from the processing fluid circuit, the lifting fluid circuit designed for dispensing a lifting fluid from a lifting fluid aperture thereof, with pressure such as to counter the force applied or modulated by the linkage mechanism, at the level of the surface. |
地址 |
Armonk NY US |