摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide gas-insulated equipment excellent in direct-current withstand voltage characteristics and compactness, favorable in resistance to insulating cracked gas, resistant to the adhesion of metallic foreign matter, and reliable by forming a film that can discharge residual direct-current voltage on the surface of an insulating spacer to make it possible to easily and reliably control the resistivity distribution of the insulating spacer. <P>SOLUTION: A diamond-like carbon film 5, 1E9 to 1E12Ωcm in resistivity and 10 to 100μm in thickness, is formed on the surface of an insulating spacer 4 by coating. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |