| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a measuring device and a measuring method capable of clarifying a correspondence relationship between a plurality of specimens placed on a specimen stand of each specimen processing device and each measurement result. <P>SOLUTION: The measuring device measures a plurality of wafers placed on a stage. A placing position on the stage to the plurality of the wafers is associated with an measuring ID, a device ID, and a position ID for specifying each wafer and stored in a memory portion. Referring to the placing position to the wafer which is stored in the memory portion, the plurality of the specimens are measured. The measurement result is associated with the measuring ID, the device ID, and the position ID corresponding to each wafer to be stored. The stored measurement result is associated with the measuring ID, the device ID, and the position ID corresponding to the measurement result to be displayed on a display portion. <P>COPYRIGHT: (C)2012,JPO&INPIT |
