VACUUM PUMP

摘要

A vacuum pump comprises a screw groove exhaust section including a rotor cylindrical section and a stator; a base; an inner stator forming an inner gas discharge path between an inner peripheral surface of the rotor cylindrical section and the inner stator; an outer stator forming an outer gas discharge path between an outer peripheral surface of the rotor cylindrical section and the outer stator, and being thermally coupled to the inner stator; a communication opening formed on the rotor, and allowing the outer gas discharge path and the inner gas discharge path to communicate with each other on an upstream side; an exhaust opening discharging the joined gas of the gas passing through the outer gas discharge path and the gas passing through the inner gas discharge path from the screw groove exhaust section toward the exhaust port.

主权项

1. A vacuum pump that discharges gas that has been sucked through a suction opening through an exhaust port, the vacuum pump comprising:
a screw groove exhaust section including a rotor cylindrical section and a stator; a base constituting a part of a pump container; a rotor having the rotor cylindrical section; an inner stator forming an inner gas discharge path of the screw groove exhaust section between an inner peripheral surface of the rotor cylindrical section and the inner stator; an outer stator forming an outer gas discharge path of the screw groove exhaust section between an outer peripheral surface of the rotor cylindrical section and the outer stator, and being thermally coupled to the inner stator; a communication opening formed on the rotor, and allowing the outer gas discharge path and the inner gas discharge path to communicate with each other on an upstream side; an exhaust opening discharging the joined gas of the gas passing through the outer gas discharge path and the gas passing through the inner gas discharge path from the screw groove exhaust section toward the exhaust port; and a base cooling device for cooling the base.