HANDLER FOR TESTING A SEMICONDUCTOR DEVICE PROVIDING A STABLE TEMPERATURE ENVIRONMENT

摘要

A handler for testing a semiconductor device capable of keeping a stable temperature is provided to decrease yield rate reduction due to temperature variation in a test chamber by dividing the test chamber into a plurality of test spaces and installing a thermoelectric device and a second chamber additionally. A handler for testing a semiconductor device capable of keeping a stable temperature includes a loading unit, a soak chamber, a test chamber, a de-soak chamber, and an unloading unit. A plurality of semiconductor devices in a tray coming into the soak chamber by the loading unit is aging from a predetermined temperature. The test chamber as an inspecting space for the aged semiconductor devices includes a first chamber(350), a second chamber(360) adjacent to the first chamber, and a pair of pipe lines(370,380), being installed to be connected with the first and second chamber(350,360), circulating a medium for temperature control.