| 摘要 |
PURPOSE:To improve the adhesion of a terminal leading-out section and a glass substrate, and to reduce the generation of a defective such as the slip-off of a lead by evaporating a chromium film in thickness of 5 or 50 angstroms onto the glass substrate and evaporating a ferromagnetic thin-film as a sensor pattern onto the chromium film. CONSTITUTION:A chromium film 13 is evaporated onto a glass substrate 14, and a ferromagnetic thin-film 15 as a sensor pattern is evaporated onto the chromium film 13. Consequently, the adhesion of the glass substrate 14 and the ferromagnetic thin-film 15 is enhanced through the chromium film 13 held between the substrate 14 and the thin-film 15. When the chromium film 13 is not more than 5Angstrom thick, the adhesion of the glass substrate 14 and the ferromagnetic thin-film 15 is hardly improved. When the chromium film 13 is not less than 20Angstrom thick, the characteristics of the rate of change of the resistance of a magnetic sensor is deteriorated. Accordingly, the thickness of the chromium film 13 held between the glass substrate 14 and the ferromagnetic thin-film 15 is kept within a range of 5-20Angstrom . |
