发明名称 SEMICONDUCTOR DEVICE HAVING DUMMY GATE PATTERN
摘要 A semiconductor device includes a diffusion layer formed on a semiconductor substrate, a gate pattern arranged over the diffusion layer, and a dummy gate pattern arranged adjacently to the gate pattern with a constant gap over the diffusion layer. The gate pattern functions as a gate electrode of a MOS transistor while the dummy gate pattern does not function as the gate electrode. The dummy gate pattern is disconnected at a predetermined position in a gate width direction over the diffusion layer. By this stricture, the semiconductor is capable of achieving both an improvement in dimensional accuracy and a high-speed circuit operation.
申请公布号 US2009184379(A1) 申请公布日期 2009.07.23
申请号 US20090352938 申请日期 2009.01.13
申请人 ELPIDA MEMORY, INC. 发明人 OTA KEN
分类号 H01L27/088 主分类号 H01L27/088
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