| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum processing apparatus capable of quickly exchanging a carrier cassette by accurately estimating a point of time when the processing of a wafer is completed in the carrier cassette. SOLUTION: In the vacuum processing apparatus, the wafers stored in the carrier cassettes 11-13 are conveyed to a load lock chamber 301 via an atmospheric carrier 23, a vacuum carrier 202 conveys the wafers from the load lock chamber to processing chambers 101-104, and the vacuum carrier conveys the wafers processed in the processing chambers to which the wafers are conveyed to an unload lock chamber 302, and the atmospheric carrier returns the wafers to the original carrier cassettes. In this case, a control controller 301 estimates a point of time when the processing of all wafers stored in the carrier cassettes is completed based on processing conditions for each kind of wafer and treatment situations in a plurality of processing chambers. COPYRIGHT: (C)2009,JPO&INPIT
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