发明名称 SURFACE TREATMENT APPARATUS AND PRINT CIRCUIT BOARD
摘要 <p>PROBLEM TO BE SOLVED: To provide a surface treatment apparatus which allows satisfactory flowing process liquid on an object surface to be surface treated in a substrate, and a print circuit board produced with the surface treatment apparatus.SOLUTION: An surface treatment apparatus according to the present invention is the surface treatment apparatus which transports a substrate in an in-plane direction, and supplies process liquid to the surface to perform a surface treatment. The surface treatment apparatus includes: a treatment tank; an injection part which injects the process liquid to the surface of the substrate from an injection port; and multiple transportation rollers which are provided along a transportation route for the substrate in the treatment tank. At least one of the transportation rollers is a ring roller having a ring-shaped first and a second protrusions. In an axial direction of the ring roller, the first protrusion is provided in a range facing an effective region of the substrate, and the second protrusion is provided in a range facing a marginal region of the substrate. Further, a diameter of the first protrusion is smaller than that of the second protrusion.</p>
申请公布号 JP2015017316(A) 申请公布日期 2015.01.29
申请号 JP20130147160 申请日期 2013.07.15
申请人 IBIDEN CO LTD 发明人 KAWASHIMA MOTOFUMI;MIZUTANI NAOKI;KATO TOMOHIRO
分类号 C23C18/31;C23C18/38;H05K3/06;H05K3/18 主分类号 C23C18/31
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