| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a base material levitation device which levitates a base material while avoiding interference with the base material at both end parts of the base material in a longitudinal direction.SOLUTION: A base material levitation device 1 includes: a levitation block 2 made of a porous body, the levitation block 2 in which a surface faces a base material W; and a gas supply part 3 which supplies a gas to the levitation block 2. The base material levitation device 1 jets the gas supplied from the gas supply part 3 from a surface of the levitation block 2 to levitate the base material W in an area above the levitation block 2. An area that the levitation block 2 levitates the base material W includes a first levitation area 21 corresponding to a center portion and second levitation areas 22 corresponding to areas at front and rear sides of the first levitation area 21 with respect to a longitudinal direction of the base material W. In the second levitation area 22, a thickness of the levitation block 2 is reduced from a first levitation area 21 side end part to an opposite side end part in the longitudinal direction of the base material W.</p> |
