| 发明名称 |
METHOD FOR MANUFACTURING MULTILAYER FILM, AND MULTILAYER FILM |
| 摘要 |
In this method for manufacturing a multilayer film, an electroconductive layer (3) is formed on a substrate (2, 31), a seed layer (4) containing an oxide having a Perovskite structure is sputtered so as to cover the electroconductive layer (3), and a dielectric layer (5) is formed so as to cover the seed layer (4). |
| 申请公布号 |
WO2015137198(A1) |
申请公布日期 |
2015.09.17 |
| 申请号 |
WO2015JP56238 |
申请日期 |
2015.03.03 |
| 申请人 |
ULVAC, INC. |
发明人 |
KOBAYASHI HIROKI;HENMI MITSUNORI;HIROSE MITSUTAKA;TSUKAGOSHI KAZUYA;KIMURA ISAO;SUU KOUKOU |
| 分类号 |
C23C14/08;C23C14/06;H01L21/316;H01L41/187;H01L41/316;H01L41/319 |
主分类号 |
C23C14/08 |
| 代理机构 |
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