DEPOSITION CARTRIDGE FOR PRODUCTION MATERIALS VIA THE CHEMICAL VAPOR DEPOSITION PROCESS

摘要

An electrically heated deposition cartridge for use in the production of materials via the chemical vapor deposition process that has (i) a higher ratio of surface area to volume than a seed rod pair (ii) a higher ratio of starting effective deposition surface area to final effective deposition surface area than a seed rod pair and (iii) a higher ratio of effective deposition surface area to gross surface area than a basic deposition plate which are achieved by reaching and maintaining the desired temperatures on all desired surfaces of the deposition cartridge which in turn is achieved by distribution of the desired amount of current through all desired cross sectional areas of the deposition cartridge.