Elastic retention wheels and wafer adapter containing the same wheels

摘要

An elastic retention wheel and a wafer adapter containing this wheel are disclosed. The elastic retention wheel comprises: a rim; a retention main body positioned within the rim; and a plurality of spokes. Each spoke is positioned in a space between the rim and the retention main body. One end of each spoke is coupled to the retention main body, and the other end is coupled to the rim. A sliding rail can be provided on an inner side of the rim, and the spoke's other end can slide with the sliding rail. When the elastic retention wheel is stressed by a non-uniform or excessive external force, these spokes provide enhanced support from the rim's inner side, or at least partially disperse the non-uniform external force applied to the elastic retention wheel. Thereby, the elastic retention wheel is largely kept from over-deformation or cracking.

主权项

1. An elastic retention wheel adapted for use in a wafer adapter, the elastic retention wheel comprising:
a rim; a retention main body, the retention main body being positioned within the rim and integrally formed with the rim, the retention main body and at least a portion of the rim being separated from each other by a space; and a plurality of spokes, each spoke positioned within the space, each spoke further having a first end coupled to the retention main body and a second end coupled to the rim; wherein the rim further includes a first sliding rail slidably provided on an inner side of the rim, the inner side of the rim facing the main body, and wherein the second end of each spoke is movable with the sliding rail.