Array substrate for liquid crystal display device and method of manufacturing the same

摘要

An array substrate for a liquid crystal display device comprises: gate and data lines crossing each other on a substrate to define a pixel region; a common line spaced apart from and parallel with the gate line; a thin film transistor in the pixel region and connected to the gate and data lines; a passivation layer on the thin film transistor; and pixel and common electrodes alternately arranged to produce an in-plane electric field, wherein each of the pixel and common electrodes has a double-layered structure of which the lower layer is formed of reflective conductive material and the upper layer is formed of transparent conductive material.

主权项

1. A method of manufacturing an array substrate for a liquid crystal display device, comprising:
depositing a reflective conductive material layer having a first thickness on a substrate; depositing a transparent conductive material layer having a second thickness on the reflective conductive material layer under a condition of H2O gas; forming a photoresist pattern on the transparent conductive material layer; performing a first etching process to the transparent conductive material layer and the reflective conductive material layer using the photoresist pattern as an etching mask, wherein the transparent conductive material layer has a first etch bias being larger than a second etch bias of the reflective conductive material layer such that top peripheral surfaces of the reflective conductive material layer is exposed; and performing a second etching process to the reflective conductive material layer using the etched transparent conductive material layer as an etching mask, thereby forming double-layered pixel and common electrodes.