| 发明名称 |
INSPECTION HAVING A SEGMENTED PUPIL |
| 摘要 |
A method and an apparatus that may include optics that is arranged to illuminate a surface of a sample with radiation and to collect reflected radiation from the surface of the sample; wherein the optics includes a pupil that has multiple pupil segments that correspond to different angular regions of collection or illumination; and a detection module arranged to receive the reflected radiation and generate, for each pupil segment, pupil segment detection signals. |
| 申请公布号 |
US2015193926(A1) |
申请公布日期 |
2015.07.09 |
| 申请号 |
US201414149645 |
申请日期 |
2014.01.07 |
| 申请人 |
APPLIED MATERIALS ISRAEL, LTD. |
发明人 |
Berlatzky Yoav;Shoham Amir;Dolev Ido |
| 分类号 |
G06T7/00;G01N33/00;G06T7/60;G01N21/55 |
主分类号 |
G06T7/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An apparatus comprising:
optics arranged to illuminate a surface of a sample with radiation and to collect radiation from the surface of the sample, the optics comprising a pupil having multiple pupil segments that correspond to different angular regions of collection or illumination; and a detection module arranged to receive the radiation and generate, for each pupil segment, pupil segment detection signals. |
| 地址 |
Rehovot IL |
