Self-Calibration of Source-Measure Unit via Capacitor

摘要

Systems and methods for calibration and operation of a source-measure unit (SMU). The system may include a functional unit and output terminals coupled to the functional unit. An excitation signal may be applied to a capacitor by the SMU. The capacitor may be included in a calibration circuit. The method may include obtaining one or more of a current calibration coefficient (CCC) or a voltage calibration coefficient (VCC). The CCC may correspond to a current-range setting and the VCC may correspond to a voltage-range setting. The CCC may be obtained from a value of a first current and a value of a second current developed in the capacitor responsive to the excitation signal. The VCC may be obtained from a value of a first voltage and a value of a second voltage developed across the capacitor responsive to the excitation signal.

主权项

1. A method for calibrating and operating a source-measure unit (SMU), the method comprising:
applying an excitation signal by the SMU to a capacitor; and obtaining one or more of:
a current calibration coefficient (CCC) corresponding to a current-range setting of the SMU, said obtaining the CCC comprising:
determining a value of a first current developed in a capacitor responsive to the excitation signal and a value of a second current developed in the capacitor responsive to the excitation signal; anddetermining the CCC from the value of the first current and the value of the second current; ora voltage calibration coefficient (VCC) corresponding to a voltage-range setting of the SMU, said obtaining the VCC comprising:
determining a value of a first voltage developed across the capacitor responsive to the excitation signal and a value of a second voltage developed across the capacitor responsive to the excitation signal; anddetermining the VCC from the value of the first voltage and the value of the second voltage.