| 摘要 |
<p>[Problem] To eliminate out gas troubles even in a vacuum atmosphere, and to eliminate corrosion troubles even in a corrosive gas atmosphere. [Solution] A housing of a sensor main body (110), a cable lead out section (140), and a projection/light reception section (190) excluding an optical system are formed of materials having corrosion resistance and rigidity, connecting sections of the cable lead out section (140) and the projection/light reception section (190) to the sensor main body (110), and the projection/light reception section (190) itself are configured to have airtight structures, and inside of an optical/electric processing section (180) and that of the projection/light reception section (190) are spatially blocked from outside. Furthermore, a light reflecting section (120) is formed, said light reflecting section making a light reflecting plate (122) have an airtight structure capable of transmitting light, and the light reflecting plate (122) is spatially blocked from the outside.</p> |
