| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a substrate inspection device and a recovery tool suitable for sticking a droplet to an edge of a substrate and moving it along the edge.SOLUTION: The substrate inspection device includes a substrate rotary apparatus, a recovery tool 30, and a recovery tool holding apparatus. The recovery tool 30 includes: gas supplying means 34 for supplying gas; a first tool 31 for holding a droplet adhering to an edge of a substrate; and a second tool 32 for guiding gas along the border of an adhesion region, as the region in which the droplet held by the first tool adheres to the edge of the substrate, so as to spray the gas to the surface of the substrate.</p> |
