发明名称 Fan Out Package Structure and Methods of Forming
摘要 An embodiment is a structure comprising a die having a pad on a surface and an encapsulant at least laterally encapsulating the die. The pad is exposed through the encapsulant. The structure further includes a first dielectric layer over the encapsulant and the die, a first conductive pattern over the first dielectric layer, and a second dielectric layer over the first conductive pattern and the first dielectric layer. The first dielectric layer and the second dielectric layer have a first opening to the pad of the die. The structure further includes a second conductive pattern over the second dielectric layer and in the first opening. The second conductive pattern adjoins a sidewall of the first dielectric layer in the first opening and a sidewall of the second dielectric layer in the first opening.
申请公布号 US2015137379(A1) 申请公布日期 2015.05.21
申请号 US201314081853 申请日期 2013.11.15
申请人 Taiwan Semiconductor Manufacturing Company, Ltd. 发明人 Wang Pu;Shih Ying-Ching;Lu Szu-Wei;Lin Jing-Cheng
分类号 H01L23/522;H01L21/768;H01L21/56;H01L23/31 主分类号 H01L23/522
代理机构 代理人
主权项 1. A structure comprising: a die having a pad on a surface; an encapsulant at least laterally encapsulating the die, the pad being exposed through the encapsulant; a first dielectric layer over the encapsulant and the die; a first conductive pattern over the first dielectric layer; a second dielectric layer over the first conductive pattern and the first dielectric layer, the first dielectric layer and the second dielectric layer having a first opening to the pad of the die; and a second conductive pattern over the second dielectric layer and in the first opening, the second conductive pattern adjoining a sidewall of the first dielectric layer in the first opening and a sidewall of the second dielectric layer in the first opening.
地址 Hsin-Chu TW