发明名称 SAMPLE HOLDER
摘要 <p>[Problem] To reduce the possibility of cracks forming in a ceramic body. [Solution] This sample holder (1) comprises: a ceramic body (3) having a sample holding surface (30) on the upper surface thereof; and a metal member (4) having a flange section (41) bonded to the lower surface of the ceramic body (3) and a cylindrical section (42) including a section having an inner circumferential surface space that becomes gradually narrower from the inner circumference of the flange section (41) downwards. In addition, there is a gap (43) between the inner circumferential surface of the narrow section and the lower surface of the ceramic body (3).</p>
申请公布号 WO2015072496(A1) 申请公布日期 2015.05.21
申请号 WO2014JP79994 申请日期 2014.11.12
申请人 KYOCERA CORPORATION 发明人 ASHIHARA,YOSHIHIRO;SAKAUE,KATSUSHI
分类号 C04B37/02;H01L21/683 主分类号 C04B37/02
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