| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an optical waveguide whose optical coupling efficiency with light receiving and emitting elements is high, and by which high quality optical communication is possible even when its density is increased, an opto-electric hybrid substrate and electronic equipment with high reliability including the optical waveguide. <P>SOLUTION: An optical waveguide 1 has: a laminate 12 which is constituted by alternately laminating core layers 131, 132 including core parts 14 and a side face clad part 15 adjacent to the core part 14, and clad layers 111, 112, 113; and recesses 1601, 1602, 1603, 1604 formed to the laminate 12 for the respective core parts 14. Among inner wall faces of the respective recesses, the cross section of the core parts 14 serves as a mirror. In addition, the respective recesses are formed so as to extend from the bottom face of the laminate 12 to the top face of the core parts 14 which should serve as a mirror, respectively. For example, the recess 1601 extends from the bottom face of the laminate 12 to the top face of the core layer 132, and the recess 1602 extends from the bottom face of the laminate 12 to the top face of the core layer 131. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
