发明名称 TRANSISTOR AND MANUFACTURING METHOD THEREFOR
摘要 <p>PROBLEM TO BE SOLVED: To provide a transistor and manufacturing method therefor with a nitride semiconductor, capable of improving an operation frequency by reducing a parasitic capacitance.SOLUTION: The transistor includes a gate electrode 7 having its lower side of a smaller shape than its upper side and a protection film 8 formed to cover the gate electrode 7 from its upper side. An end section of an undersurface of the gate electrode 7 is in contact with the protection film 8, and the lower side of the gate electrode 7 has regions 9, 10 with no protection film not covered with the protection film 8.</p>
申请公布号 JP2015072940(A) 申请公布日期 2015.04.16
申请号 JP20130206506 申请日期 2013.10.01
申请人 MITSUBISHI ELECTRIC CORP 发明人 OISHI TOSHIYUKI;YAMAGUCHI YUTARO;OTSUKA HIROSHI;UCHIDA HIROMITSU;YAMANAKA KOJI
分类号 H01L21/338;H01L29/41;H01L29/417;H01L29/778;H01L29/812 主分类号 H01L21/338
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