发明名称 CURABLE RESIN COMPOSITION AND PATTERN FORMATION METHOD USING THE SAME
摘要 <p>PROBLEM TO BE SOLVED: To provide a curable resin composition capable of forming a very fine and highly accurate pattern by an imprint method, and also to provide a pattern formation method using such a curable resin composition.SOLUTION: A curable resin composition includes one or more types of acrylic monomer, a polymerization initiator, and a fluorine-containing composition. The surface hardness of the curable resin composition after curing is 200 N/mmor more.</p>
申请公布号 JP2015048407(A) 申请公布日期 2015.03.16
申请号 JP20130180946 申请日期 2013.09.02
申请人 DAINIPPON PRINTING CO LTD 发明人 OKAWA YASUO;HIRAKA TAKAAKI;ODA HIROKAZU;UCHIDA TOMOYA
分类号 C08F20/10;C08L33/00;H01L21/027 主分类号 C08F20/10
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