发明名称 |
CURABLE RESIN COMPOSITION AND PATTERN FORMATION METHOD USING THE SAME |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide a curable resin composition capable of forming a very fine and highly accurate pattern by an imprint method, and also to provide a pattern formation method using such a curable resin composition.SOLUTION: A curable resin composition includes one or more types of acrylic monomer, a polymerization initiator, and a fluorine-containing composition. The surface hardness of the curable resin composition after curing is 200 N/mmor more.</p> |
申请公布号 |
JP2015048407(A) |
申请公布日期 |
2015.03.16 |
申请号 |
JP20130180946 |
申请日期 |
2013.09.02 |
申请人 |
DAINIPPON PRINTING CO LTD |
发明人 |
OKAWA YASUO;HIRAKA TAKAAKI;ODA HIROKAZU;UCHIDA TOMOYA |
分类号 |
C08F20/10;C08L33/00;H01L21/027 |
主分类号 |
C08F20/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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