| 摘要 |
PROBLEM TO BE SOLVED: To provide a physical quantity sensor capable of preventing a movable body from sticking to a circuit board.SOLUTION: A physical quantity sensor according to the present invention includes: a circuit board 10; a movable unit 20 provided with movable electrode parts 21, 22; support parts 30, 32 for supporting the movable body 20 around a first axis Q so as to be displaceable; a first fixed electrode part 50 which, when the movable body 20 is divided at the first axis Q between a first portion 20a and a second portion 20b, is disposed on the circuit board 10 facing the first portion 20a; and a second fixed electrode part 52 disposed on the circuit board 10 facing the second portion 20b. On the circuit board 10 is provided a guard part 60 for suppressing an electrostatic force occurring between the movable body 20 and the circuit board 10 in an inter-electrode area 14a between the first fixed electrode part 50 and the second fixed electrode part 52. |
