| 摘要 |
The present invention relates to a deposition apparatus, and a method of manufacturing an organic light emitting display device using the same. According to the present invention, a deposition apparatus includes: a deposition part to form a thin film on a substrate, and a cooling plate to cool the substrate. The deposition part includes: a first deposition source, a second deposition source, and a third deposition source. The first deposition source and the second deposition source deposit a low temperature viscosity change inorganic material on the substrate to form the thin film, and the third deposition source can dope the thin film with tungsten; thus improving the characteristics of a sealing layer. |
