TEST STRUCTURE, ARRAY SUBSTRATE HAVING THE SAME AND METHOD OF MEASURING SHEET RESISTANCE USING THE SAME

摘要

A test structure includes a terminal pattern, a first extending part, a second extending part and a measuring part. The terminal pattern includes a first terminal part, a second terminal part, a third terminal part and a fourth terminal part sequentially disposed and spaced apart from each other in a first direction. The first extending part is connected to the first terminal part and the second terminal part. The first extending part extends in a second direction crossing the first direction. The second extending part is connected to the third terminal part and the fourth terminal part. The second extending part extends in the second direction. The measuring part partially overlaps the first extending part and the second extending part.

主权项

1. A test structure, comprising:
a terminal pattern comprising a first terminal part, a second terminal part, a third terminal part and a fourth terminal part sequentially disposed and spaced apart from each other in a first direction; a first extending part connected to the first terminal part and the second terminal part, wherein the first extending part extends in a second direction crossing the first direction; a second extending part connected to the third terminal part and the fourth terminal part, wherein the second extending part extends in the second direction; and a measuring part partially overlapping the first extending part and the second extending part.