发明名称 Memory Arrays, Semiconductor Constructions, and Methods of Forming Semiconductor Constructions
摘要 Some embodiments include memory arrays. The memory arrays may have digit lines under vertically-oriented transistors, with the digit lines interconnecting transistors along columns of the array. Each individual transistor may be directly over only a single digit line, with the single digit line being entirely composed of one or more metal-containing materials. The digit lines can be over a deck, and electrically insulative regions can be directly between the digit lines and the deck. Some embodiments include methods of forming memory arrays. A plurality of linear segments of silicon-containing material may be formed to extend upwardly from a base of the silicon-containing material. The base may be etched to form silicon-containing footings under the linear segments, and the footings may be converted into metal silicide. The linear segments may be patterned into a plurality of vertically-oriented transistor pedestals that extend upwardly from the metal silicide footings.
申请公布号 US2015014766(A1) 申请公布日期 2015.01.15
申请号 US201414502978 申请日期 2014.09.30
申请人 Micron Technology, Inc. 发明人 Heineck Lars P.;Surthi Shyam;Guha Jaydip
分类号 H01L27/108;H01L29/66;H01L29/778 主分类号 H01L27/108
代理机构 代理人
主权项
地址 Boise ID US