TARGET PREPARATION

摘要

The present invention relates to a method for coating workpieces, comprising the following steps: - loading a coating chamber with the workpieces to be coated; - closing and evacuating the coating chamber to a predetermined process pressure; - starting a coating source, which comprises a target as a material source, whereby particles are accelerated from the surface of the target in the direction of substrates, characterised in that a shield is provided between the target surface and the substrate until the target is conditioned, the substrates to be coated at least partially being subjected to a pretreatment in the meantime.