主权项 |
1. An automatic X-ray inspection apparatus, comprising:
a stage unit configured to attachably/detachably support an object to be inspected, the stage unit being movable on an X-axis and Y-axis on a plane and rotatable; an X-ray vacuum tube arranged beneath the stage unit to irradiate the object arranged on the stage unit with X-rays; a detector arranged above the stage unit to swivel toward one side, and configured to detect X-rays transmitted through the object; and an image processor configured to perform high-speed reconstruction on a plurality of digital image signals transferred from the detector, and then perform three-dimensional (3D) inspection, the image processor including at least four graphics processing unit (GPU) cores to perform the high-speed reconstruction, wherein the X-ray vacuum tube swivels in synchronization with the swiveling of the detector, and an X-ray emission surface of the X-ray vacuum tube is arranged to be parallel to the stage unit, the stage unit includes a hollow shaft, and a hollow bearing configured to rotatably support the hollow shaft, and the detector converts the X-rays, which transmit the object and are ionized, into an electrical signal, amplifies the converted electrical signal, and converts the amplified electrical signal into a digital image signal. |