发明名称 AUTOMATIC X-RAY INSPECTION APPARATUS FOR SMT INLINE PROCESS
摘要 The invention relates to an automatic X-ray inspection apparatus for a SMT inline process, comprising: a stage unit for supporting an object to be inspected such that the object is attachable/detachable, the stage unit being movable on an X-axis and Y-axis in a plane and rotatable; an X-ray vacuum tube arranged beneath the stage unit so as to irradiate the object arranged on the stage unit with X-rays; and a detector arranged above the stage unit so as to swivel toward one side in order to detect X-rays transmitted through the object. The X-ray vacuum tube swivels in synchronization with the swiveling of the detector, and an X-ray emission surface of the X-ray vacuum tube is arranged so as to be parallel to the stage unit. The stage unit has a hollow shaft, and a hollow bearing that supports the hollow shaft such that the hollow shaft is rotatable.
申请公布号 US2015003578(A1) 申请公布日期 2015.01.01
申请号 US201214366614 申请日期 2012.12.21
申请人 SEC CO., LTD. 发明人 Kim Jong-hyun;Kim Man-seok;Ryu Ki-ung;Ryu Ki-jun
分类号 G01N23/04;H01J37/18 主分类号 G01N23/04
代理机构 代理人
主权项 1. An automatic X-ray inspection apparatus, comprising: a stage unit configured to attachably/detachably support an object to be inspected, the stage unit being movable on an X-axis and Y-axis on a plane and rotatable; an X-ray vacuum tube arranged beneath the stage unit to irradiate the object arranged on the stage unit with X-rays; a detector arranged above the stage unit to swivel toward one side, and configured to detect X-rays transmitted through the object; and an image processor configured to perform high-speed reconstruction on a plurality of digital image signals transferred from the detector, and then perform three-dimensional (3D) inspection, the image processor including at least four graphics processing unit (GPU) cores to perform the high-speed reconstruction, wherein the X-ray vacuum tube swivels in synchronization with the swiveling of the detector, and an X-ray emission surface of the X-ray vacuum tube is arranged to be parallel to the stage unit, the stage unit includes a hollow shaft, and a hollow bearing configured to rotatably support the hollow shaft, and the detector converts the X-rays, which transmit the object and are ionized, into an electrical signal, amplifies the converted electrical signal, and converts the amplified electrical signal into a digital image signal.
地址 Gyeonggi-do KR